It is also possible to work in standard chamber furnaces under protective gas atmosphere. To do so, a separate gas grid is required. The gas grid can be put into or removed from the furnace together with the furnace run. Advantages compared to the SEMI gas-tight chamber furnace:
■ shorter cycle times as the gas grid cools down outside of the furnace while the second gas grid can again heat up in the furnace. ■ low gas consumption
